Temperature–Time Texture Transition of Pb(Zr1−xTix)O3 Thin Films: I, Role of Pb-rich Intermediate Phases
نویسندگان
چکیده
Lead-rich intermediate phases, in particular Pt,,Pb and PbO, are found to form on Pt(ll1) atop Ti-buffered Si substrates prior to formation of Pb(Zr, -*TiX)O3 (PZT) thin films. Pt,_,Pb is a [ill] textured transient intermetallic phase that nucleates PZT[111] texture. PbO is a [OOl] textured layer compound that nucleates PZT[100] texture. The formation conditions and lattice matching of these intermediate phases have been examined. The presence of other possible intermediate phases, such as pyrochlore and Zr and Ti-rich phases, has also been investigated but found unrelated to the texture selection of perovskite PZT.
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